Journal of Micro/Nanolithography, MEMS, and MOEMS
VOL. 17 · NO. 3 | July 2018
J. Micro/Nanolith. MEMS MOEMS 17(3), 030101 (10 August 2018)
TOPICS: Monte Carlo methods, Stochastic processes, Photoresist developing, Physical sciences, Lead, Calibration, Lithography, Photoresist materials
J. Micro/Nanolith. MEMS MOEMS 17(3), 033501 (23 July 2018)
TOPICS: Polymers, Extreme ultraviolet lithography, Extreme ultraviolet, Photoresist materials, Molecules, Absorbance, Chemical reactions, Absorption, Spectroscopy, Electrodes
J. Micro/Nanolith. MEMS MOEMS 17(3), 034001 (14 August 2018)
TOPICS: Semiconducting wafers, Data modeling, Metrology, Reactive ion etching, Diffractive optical elements, Optics manufacturing, Optical lithography, Scatterometry, Overlay metrology, Transmission electron microscopy
J. Micro/Nanolith. MEMS MOEMS 17(3), 034501 (24 July 2018)
TOPICS: Microfluidics, CMOS sensors, Signal to noise ratio, Sensors, Microfluidic imaging, Imaging systems, Amplifiers, System integration, Signal detection, Integrated optics
Microelectromechanical systems (MEMS)
J. Micro/Nanolith. MEMS MOEMS 17(3), 035001 (10 July 2018)
TOPICS: Gyroscopes, Demodulation, Microelectromechanical systems, Signal detection, Neural networks, Temperature metrology, Evolutionary algorithms, Control systems, Data modeling, Lithium
Back to Top